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Automatic Wafer Handling

Stäubli Robotics

Faverges (France) - In 1997, INFINEON, formerly SIEMENS, began working with Stäubli to provide a robot for wafer handling.

INFINEON selected three Stäubli RX130 CR Class 10 Cleanroom robots for this project. The capability of this six-axis articulated robot arm allowed INFINEON to successfully respond to the increasing demand for wafers. In addition, the system increases production, while improving overall quality.

INFINEON required the design and construction of a fully automated retention bake system to replace the exis-ting manual operation. The required system handles 150 silicon wafers from an incoming shipping container to the test chamber to an outgoing shipping container. The requirements for this system included the following goals:

  • Fully automated process control
  • Insure wafer integrity without damage
  • Meet Class 10 Cleanroom standard
  • Provide efficient use of cleanroom floor space.

These goals were all met through the use of Stäubli RX130 CR Cleanroom robots.

Within the fully automated process the robot must load and unload a pair of ovens with four horizontal floors situated face to face. The loading process begins with a shipping box, which the robot loads into the oven. Then the robot returns to its safety position and the bake sequence is started. After the robot has controlled the re-sults of the baking process, the unloading process takes place in the opposite sequence with the robot re-moving the shipping box.

Stäubli is a 100+ year old, 2,400-employee Company with annual revenues of over 600 million Swiss Francs, headquartered in Switzerland. The Stäubli Group commitment to customer satisfaction is proven by worldwide office locations offering a 'first class' level of services such as training and maintenance.

In its production facility located in the heart of the French Alps a few miles south of Geneva (Switzerland), Stäubli's Robotics Division invests 12 % of its revenues in Research and Development. An innovation and quality strategy has led Stäubli to be awarded ISO 9001 for its three divisions: textile, connectors and robotics.

For additional information, please contact
Marketing Manager
Stäubli Corporation - Robotics Division
201 Parkway West
Duncan, SC 29334
Tel. 864-433-1980
Fax. 864-486-5497


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