Robotics Online - RIA - Robotic Industries Association
Case Studies

Fully Automatic Wafer Etching Equipment

Stäubli Robotics

 

Faverges (France) - March 6th, 2000 - RENA, along with their customers, develops etching, electroplating, drying and cleaning solutions for the semi-conductor, solar, micro structure, medical / pharmaceutical and chemical equipment industries.

Since 1993, RENA has been successfully providing solutions to customers' requirements. Located in Southeast Germany, RENA's team of specialists develops and produces complex equipment, with 'innovation' as their moto.

The illustrated etching equipment was built in 1998/99 and was equipped with a Stäubli RX130 CR robot. In cooperation with their customers, RENA defined new or modified processes, which resulted in re-producible homogeneous etching rates. High sensitive silicon wafers are processed in the illustrated echting equipment.

Prior to the etching process, it is necessary to automate the input of the carrier from the previous equipment and the transfer and measurement process. By using the Stäubli RX130 CR robots, the system yield has been drastically improved over the previous manual operation. The robots' function is to identify the carriers at a reading station, to check if the single wafers in the carrier are complete, to put the carrier on the measurement station and afterwards on the transfer station and finally to transport the empty carriers on the output channel.

To execute a clean and precise process, RENA placed the following demands on the robot:

  • Minimum particle generation 
  • Very high robot precision when positioning the carrier,
  • High speed to insure system throughput.

The Stäubli 6 - axis RX130 CR robot fulfills these requirements. Because of the cleanroom ability and the optimal functionality, RENA and their customers specified and chose the Stäubli robot.

Stäubli is a 100+ year old, 2,400-employee Company with annual revenues of over 600 million Swiss Francs, headquartered in Switzerland. The Stäubli Group commitment to customer satisfaction is proven by worldwide office locations offering a 'first class' level of services such as training and maintenance.

In its production facility located in the heart of the French Alps a few miles south of Geneva (Switzerland), Stäubli's Robotics Division invests 12 % of its revenues in Research and Development. An innovation and quality strategy has led Stäubli to be awarded ISO 9001 for its three divisions: textile, connectors and robotics.

For additional information, please contact
Marketing Manager
Stäubli Corporation - Robotics Division
201 Parkway West
Duncan, SC 29334
USA
Tel. 864-433-1980
Fax. 864-486-5497
robot.usa@staubli.com

Automated Imaging Association Motion Control Association