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Rexroth Linear Motion System: Linear Drive Solution for Vacuum Environments

Bosch Rexroth Corporation

Rexroth’s complete solution for material handling in cleanroom and vacuum applications simplifies high-precision workpiece transport under demanding process conditions. The innovative technology greatly simplifies the design of highly complex production lines and eliminates the need for failure-prone seals on motors, mechanical subassemblies and supply lines.

(Pleasanton, CA) In the semiconductor and solar industry tools need a reliable mechanism to transport wafers into, within and out of chambers for various processes like deposition or etching. Rexroth’s Linear Motion System has a proven track record as a high-precision drive solution in PECVD (Plasma Enhanced Chemical Vapor Deposition) applications under vacuum conditions on photovoltaic cell production lines. A coil mounted outside the process chamber drives the carrier with a magnet track mounted on it. Hall sensors ensure excellent repeatability. The solution is highly modular and scalable: by simply adding more coils, the carriers can be driven over longer distances. The Rexroth NYCe 4000 integrated drive & control system can handle a wide power range. The carriers are driven independently and can have different motion profiles, providing a solution which can handle complex motion operations.

The linear drive system delivers reliable operation under any of the process conditions which are needed to manufacture displays, optical components, photovoltaic cells and semiconductors including vacuum, inert gas or temperatures up to 110°C. The innovative technology greatly simplifies the design of highly complex production lines and eliminates the need for failure-prone seals on motors, mechanical subassemblies and supply lines.

The Rexroth NYCe 4000, which has been optimized for semiconductor and solar applications, controls high-precision positioning and motion profiles which are gentle on the process material. Every node in the distributed network controls up to 10 linear drive coils and communicates via a bus system with the control software which is loaded in a PC. High-end motion control featuring open software architecture provides an extremely flexible automation solution for modules and complex machines, and it offers OEMs excellent know-how protection.

Programming using the flexible C-interface shortens the development cycle. Users have comprehensive motion functionality at their fingertips which enables them to meet demanding speed and precision requirements. Up to 120 digital and analog I/Os are available to connect sensors and handle very complex process steps. The modular system design is ideally suited for large machine engineering projects.

Bosch Rexroth AG is one of the world’s leading specialists in the field of drive and control technologies. Under the brand name of Rexroth the company supplies more than 500,000 customers with tailored solutions for driving, controlling and moving. Bosch Rexroth is a partner for industrial applications and factory automation, mobile applications and renewable energy. As The Drive & Control Company, Bosch Rexroth develops, produces and sells components and systems in more than 80 countries. In 2009 Bosch Rexroth, part of the Bosch Group, achieved sales of around $5.7 billion (4.1 billion Euro) with 34,200 employees.

For more information please visit: www.boschrexroth-us.com.
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