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56-Axis, 20 Ton Nanopositioning System for X-Ray Microscopy, Tomography, Laminography
PI (Physik Instrumente) LP Posted 06/07/2019
The MiQA System – X-ray Microscopy & Quality Assurance of Optical Elements MiQA is a 20-ton, 56-axis motion system of extraordinary precision, designed for beam lines around synchrotrons and will be used for x-ray microscopy and quality assurance of x-ray optics such as lenses. The system is equipped with 56 motors 16 controllers, 7 air bearing granite sliders and has an overall mass of more than 20,000 kilograms for moving and positioning small elements with the weight of only a few grams.