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6D Non-Contact Surface Metrology for Aspheric Optics with 6-Axis Hexapod Parallel Robot Motion System
PI (Physik Instrumente) LP Posted 06/07/2019
6-Axis Hexapod parallel robot precision positioning systems from PI can help speed up measurements of aspheric surfaces. Testing aspherical shape accuracy can be a major challenge for the manufacturer when deviations in the nanometer range need to be measured and high throughput is required. The system shown here, based on a new interferometer designed by metrology specialist Mahr utilizes a 6-axis hexapod motion and positioning system from PI.