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Air Bearings How do they work? Example XY Air Bearing Stage: PIglide HS www.pi.ws
PI (Physik Instrumente) LP Posted 06/11/2019
Air Bearings: How do they work? Air bearings provide very smooth and accurate motion. They can be used in linear and rotary motion systems. XY-Stages with the highest motion fidelity are based on a planar air bearing design driven by linear motors. Air bearing stages provide extremely straight and flat XY motion. Air bearing stages are used wafer inspection and scribing applications, as well as other ultra-precision motion applications such as flat panel inspection.