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Robotics Videos

How Does a MagLev Stage (Magnetic Levitation) provide Nanometer Precision Motion?

PI (Physik Instrumente) LP

Magnetic levitation stages provide similar precision motion performance to air bearing positioners but have additional advantages. The PIMag 6D is a design concept for multi-axis nanopositioning applications where the highest precision is required, e.g. in semiconductor processing and inspection systems. This novel precision positioning system is based on magnetic levitation: The completely passive platform levitates on a magnetic field, which actively positions and also guides it.


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