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How Does a MagLev Stage (Magnetic Levitation) provide Nanometer Precision Motion?
PI (Physik Instrumente) LP Posted 06/11/2019
Magnetic levitation stages provide similar precision motion performance to air bearing positioners but have additional advantages. The PIMag 6D is a design concept for multi-axis nanopositioning applications where the highest precision is required, e.g. in semiconductor processing and inspection systems. This novel precision positioning system is based on magnetic levitation: The completely passive platform levitates on a magnetic field, which actively positions and also guides it.