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Operating Modes of High-Force Piezo-Walk Motor / Drive System, Nanometer Precision
PI (Physik Instrumente) LP Posted 06/07/2019
Nexline PiezoWalk motors provide high forces and nanometer precision motion. They are constructed of a combination of linear piezo actuators and shear actuators working together. A digital controller coordinates the preloaded elements. Multiple operating modes provide optimized performance for force, speed and holding force. A parking mode lets the actuator maintain a nanometer stable position when powered-off.