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Silicon Photonics Wafer Prober: 6D-Hexapod Pivot Point Demo for Active Optical Alignment
PI (Physik Instrumente) LP Posted 06/07/2019
The pivot point demo shows the advantages of a programmable pivot point in hexapod parallel kinematics active alignment systems. The PI H-811 Hexapod and P-616 piezo nano-scanner are mounted on a Cascade Microtech wafer prober. Video courtesy Cascade Microtech div. of. Formfactor, Inc.