XY-Stage with Air Bearings: PIglide IS Planar Motion Stage

PI (Physik Instrumente) LP Posted 06/11/2019

XY-stages based on air bearings provide superior geometric performance such as flatness and straightness, because the same reference place is used for the X and Y motion. The PIglide IS planar stage provides Planar XY Travel to 200mm Load to 20kg Velocity to 1m/s Acceleration to 1g Straightness/Flatness ±10nanometers over 10 mm travel