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PRODUCT CATALOG

Cleanroom Robots

Stäubli Robotics

The electronics and semiconductor industries are particularly demanding when it comes to precision, speed and reduced particle emissions. To meet their robotics needs, Stäubli offers an ultra-high performance line of Cleanroom robotic arms for highly sensitive applications. Our robots can manipulate the silicon wafers used to make semiconductors with exceptional accuracy, high speed and smooth trajectories.

Features and benefits

The robots meet ISO 14644-1 class 2/3 or FED209E subclass 1 standards and feature a totally enclosed arm with a glossy polyurethane surface, capable of high dexterity. A compact arm footprint helps to save precious cleanroom volume.

Model: Cleanroom Robot Series


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