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PRODUCT CATALOG

Integrated XY Linear Motor Stage for Metrology

PI (Physik Instrumente) LP

This low-profile integrated XY stage provides smooth motion with velocity to 200mm/sec. Stepper and linear motor versions are available: driven by ironless linear motors and equipped with linear encoders for direct position feedback, the stage is ideal for metrology and precision automation applications. Crossed roller bearings with anti-creep cage assist provide guiding accuracy of 3µm straightness / flatness for loads up to 5kg.

  • Linear Motor and Stepper Motor Versions
  • Low Profile Integrated XY Stage 310×310×80mm
  • Travel Range 205mm x 205mm (8”)
  • 10nm Sensor Resolution
  • Repeatability to 0.1µm
  • Velocity to 200mm/s
  • Load Capacity to 5kg

Click here to download the PDF Datasheet >

Model: V-731


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